Sponsoring Society and Committee: IEEE Microwave Theory and Techniques Society/Standards  Committee (MTT/SC)

Title:Recommended Practice for Microwave, Millimeter-wave and THz On-Wafer Calibrations, De-Embedding and Measurements

Scope: This Recommended Practice describes best-practice procedures for performing accurate on-wafer calibrations, de-embedding and measurements at microwave, millimeter-wave and THz frequencies. Recommendations are given for designing and performing both accurate on-wafer calibrations in coplanar waveguide and microstrip lines fabricated directly on a user’s wafer and off-wafer “probe-tip” working calibrations.